Pulse-on-Demand Operation for Precise High-Speed UV Laser Microstructuring.

Autor: Kočica JJ; Faculty of Mechanical Engineering, University of Ljubljana, Aškerčeva 6, SI-1000 Ljubljana, Slovenia., Mur J; Faculty of Mechanical Engineering, University of Ljubljana, Aškerčeva 6, SI-1000 Ljubljana, Slovenia., Didierjean J; Bloom Lasers, Avenue de Canteranne 11, 33600 Pessac, France., Guillossou A; Bloom Lasers, Avenue de Canteranne 11, 33600 Pessac, France., Saby J; Bloom Lasers, Avenue de Canteranne 11, 33600 Pessac, France., Petelin J; Faculty of Mechanical Engineering, University of Ljubljana, Aškerčeva 6, SI-1000 Ljubljana, Slovenia., Mincuzzi G; ALPhANOV, Aquitania Institute of Optics, Rue François Mitterrand, 33400 Talence, France., Petkovšek R; Faculty of Mechanical Engineering, University of Ljubljana, Aškerčeva 6, SI-1000 Ljubljana, Slovenia.
Jazyk: angličtina
Zdroj: Micromachines [Micromachines (Basel)] 2023 Apr 13; Vol. 14 (4). Date of Electronic Publication: 2023 Apr 13.
DOI: 10.3390/mi14040843
Abstrakt: Laser microstructuring has been studied extensively in the last decades due to its versatile, contactless processing and outstanding precision and structure quality on a wide range of materials. A limitation of the approach has been identified in the utilization of high average laser powers, with scanner movement fundamentally limited by laws of inertia. In this work, we apply a nanosecond UV laser working in an intrinsic pulse-on-demand mode, ensuring maximal utilization of the fastest commercially available galvanometric scanners at scanning speeds from 0 to 20 m/s. The effects of high-frequency pulse-on-demand operation were analyzed in terms of processing speeds, ablation efficiency, resulting surface quality, repeatability, and precision of the approach. Additionally, laser pulse duration was varied in single-digit nanosecond pulse durations and applied to high throughput microstructuring. We studied the effects of scanning speed on pulse-on-demand operation, single- and multipass laser percussion drilling performance, surface structuring of sensitive materials, and ablation efficiency for pulse durations in the range of 1-4 ns. We confirmed the pulse-on-demand operation suitability for microstructuring for a range of frequencies from below 1 kHz to 1.0 MHz with 5 ns timing precision and identified the scanners as the limiting factor even at full utilization. The ablation efficiency was improved with longer pulse durations, but structure quality degraded.
Databáze: MEDLINE