Quantitative analysis of carbon impurity concentrations in GaN epilayers by cathodoluminescence.
Autor: | Loeto K; Department of Materials Science and Metallurgy, University of Cambridge, CB3 0FS Cambridge, United Kingdom. Electronic address: kl514@cam.ac.uk., Kusch G; Department of Materials Science and Metallurgy, University of Cambridge, CB3 0FS Cambridge, United Kingdom., Ghosh S; Department of Materials Science and Metallurgy, University of Cambridge, CB3 0FS Cambridge, United Kingdom., Kappers MJ; Department of Materials Science and Metallurgy, University of Cambridge, CB3 0FS Cambridge, United Kingdom., Oliver RA; Department of Materials Science and Metallurgy, University of Cambridge, CB3 0FS Cambridge, United Kingdom. |
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Jazyk: | angličtina |
Zdroj: | Micron (Oxford, England : 1993) [Micron] 2023 Sep; Vol. 172, pp. 103489. Date of Electronic Publication: 2023 Jun 22. |
DOI: | 10.1016/j.micron.2023.103489 |
Abstrakt: | In this work, a technique for quantifying carbon doping concentrations in GaN:C/AlGaN buffer structures using cathodoluminescence (CL) is presented. The method stems from the knowledge that the blue and yellow luminescence intensity in CL spectra of GaN varies with the carbon doping concentration. By calculating the blue and yellow luminescence peak intensities normalised to the peak GaN near-band-edge intensity for GaN layers of known carbon concentrations, calibration curves that show the change in normalised blue and yellow luminescence intensity with carbon concentration in the 10 16 - 10 19 cm -3 range were derived at both room temperature and 10 K. The utility of such calibration curves was then examined by testing against an unknown sample containing multiple carbon-doped GaN layers. The results obtained from CL using the normalised blue luminescence calibration curves are in close agreement with those from secondary-ion mass spectroscopy (SIMS). However,the method fails when applying calibration curves obtained from the normalised yellow luminescence likely due to the influence of native V Competing Interests: Declaration of Competing Interest The authors declare the following financial interests/personal relationships which may be considered as potential competing interests: Kagiso Loeto reports financial support was provided by Republic of Botswana Government. (Copyright © 2023. Published by Elsevier Ltd.) |
Databáze: | MEDLINE |
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