Three-dimensional printing of silica glass with sub-micrometer resolution.

Autor: Huang PH; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Laakso M; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Edinger P; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Hartwig O; Institute of Physics, Faculty of Electrical Engineering and Information Technology, University of the Bundeswehr Munich & SENS Research Center, Neubiberg, 85577, Germany., Duesberg GS; Institute of Physics, Faculty of Electrical Engineering and Information Technology, University of the Bundeswehr Munich & SENS Research Center, Neubiberg, 85577, Germany., Lai LL; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Mayer J; Central Facility for Electron Microscopy (GFE), RWTH Aachen University, Aachen, 52074, Germany., Nyman J; Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping, 58183, Sweden., Errando-Herranz C; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Stemme G; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Gylfason KB; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden., Niklaus F; Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, 10044, Sweden. frank@kth.se.
Jazyk: angličtina
Zdroj: Nature communications [Nat Commun] 2023 Jun 07; Vol. 14 (1), pp. 3305. Date of Electronic Publication: 2023 Jun 07.
DOI: 10.1038/s41467-023-38996-3
Abstrakt: Silica glass is a high-performance material used in many applications such as lenses, glassware, and fibers. However, modern additive manufacturing of micro-scale silica glass structures requires sintering of 3D-printed silica-nanoparticle-loaded composites at ~1200 °C, which causes substantial structural shrinkage and limits the choice of substrate materials. Here, 3D printing of solid silica glass with sub-micrometer resolution is demonstrated without the need of a sintering step. This is achieved by locally crosslinking hydrogen silsesquioxane to silica glass using nonlinear absorption of sub-picosecond laser pulses. The as-printed glass is optically transparent but shows a high ratio of 4-membered silicon-oxygen rings and photoluminescence. Optional annealing at 900 °C makes the glass indistinguishable from fused silica. The utility of the approach is demonstrated by 3D printing an optical microtoroid resonator, a luminescence source, and a suspended plate on an optical-fiber tip. This approach enables promising applications in fields such as photonics, medicine, and quantum-optics.
(© 2023. The Author(s).)
Databáze: MEDLINE
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