Quasi-seamless stitching for large-area micropatterned surfaces enabled by Fourier spectral analysis of moiré patterns.

Autor: Kim WY; Department of Smart Manufacturing Engineering, Changwon National University, Changwon, South Korea., Seo BW; Department of Smart Manufacturing Engineering, Changwon National University, Changwon, South Korea., Lee SH; Department of Smart Manufacturing Engineering, Changwon National University, Changwon, South Korea., Lee TG; Department of Smart Manufacturing Engineering, Changwon National University, Changwon, South Korea., Kwon S; Department of Flexible & Printed Electronics, Korea Institute of Machinery and Materials, Daejeon, South Korea., Chang WS; Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials, Daejeon, South Korea.; Department of Nanomechatronics, University of Science and Technology, Daejeon, South Korea., Nam SH; Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA., Fang NX; Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.; Department of Mechanical Engineering, The University of Hong Kong, Hong Kong, Hong Kong, Special Administrative Region of China., Kim S; Department of Smart Manufacturing Engineering, Changwon National University, Changwon, South Korea. kimseok@changwon.ac.kr.; Department of Mechanical Engineering, Changwon National University, Changwon, South Korea. kimseok@changwon.ac.kr., Cho YT; Department of Smart Manufacturing Engineering, Changwon National University, Changwon, South Korea. ytcho@changwon.ac.kr.; Department of Mechanical Engineering, Changwon National University, Changwon, South Korea. ytcho@changwon.ac.kr.
Jazyk: angličtina
Zdroj: Nature communications [Nat Commun] 2023 Apr 18; Vol. 14 (1), pp. 2202. Date of Electronic Publication: 2023 Apr 18.
DOI: 10.1038/s41467-023-37828-8
Abstrakt: The main challenge in preparing a flexible mold stamp using roll-to-roll nanoimprint lithography is to simultaneously increase the imprintable area with a minimized perceptible seam. However, the current methods for stitching multiple small molds to fabricate large-area molds and functional surfaces typically rely on the alignment mark, which inevitably produces a clear alignment mark and stitched seam. In this study, we propose a mark-less alignment by the pattern itself method inspired by moiré technique, which uses the Fourier spectral analysis of moiré patterns formed by superposed identical patterns for alignment. This method is capable of fabricating scalable functional surfaces and imprint molds with quasi-seamless and alignment mark-free patterning. By harnessing the rotational invariance property in the Fourier transform, our approach is confirmed to be a simple and efficient method for extracting the rotational and translational offsets in overlapped periodic or nonperiodic patterns with a minimized stitched region, thereby allowing for the large-area and quasi-seamless fabrication of imprinting molds and functional surfaces, such as liquid-repellent film and micro-optical sheets, that surpass the conventional alignment and stitching limits and potentially expand their application in producing large-area metasurfaces.
(© 2023. The Author(s).)
Databáze: MEDLINE
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