Highly Regular LIPSS on Thin Molybdenum Films: Optimization and Generic Criteria.

Autor: Sládek J; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic.; Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Trojanova 13, 120 00 Prague, Czech Republic., Hlinomaz K; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic.; Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Trojanova 13, 120 00 Prague, Czech Republic., Mirza I; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic., Levy Y; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic., Derrien TJ; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic., Cimrman M; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic.; Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Trojanova 13, 120 00 Prague, Czech Republic., Nagisetty SS; Coherent Laser Systems GmbH & Co. KG, Hans Boeckler Str. 12, 37079 Göttingen, Germany., Čermák J; Institute of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 162 00 Prague, Czech Republic., Stuchlíková TH; Institute of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 162 00 Prague, Czech Republic., Stuchlík J; Institute of Physics of the Czech Academy of Sciences, Cukrovarnická 10, 162 00 Prague, Czech Republic., Bulgakova NM; HiLASE Centre, Institute of Physics of the Czech Academy of Sciences, Za Radnicí 828, 252 41 Dolní Břežany, Czech Republic.
Jazyk: angličtina
Zdroj: Materials (Basel, Switzerland) [Materials (Basel)] 2023 Apr 04; Vol. 16 (7). Date of Electronic Publication: 2023 Apr 04.
DOI: 10.3390/ma16072883
Abstrakt: A systematic experimental study was performed to determine laser irradiation conditions for the large-area fabrication of highly regular laser-induced periodic surface structures (HR-LIPSS) on a 220 nm thick Mo film deposited on fused silica. The LIPSS were fabricated by scanning a linearly polarized, spatially Gaussian laser beam at 1030 nm wavelength and 1.4 ps pulse duration over the sample surface at 1 kHz repetition rate. Scanning electron microscope images of the produced structures were analyzed using the criterion of the dispersion of the LIPSS orientation angle (DLOA). Favorable conditions, in terms of laser fluence and beam scanning overlaps, were identified for achieving DLOA values <10∘. To gain insight into the material behavior under these irradiation conditions, a theoretical analysis of the film heating was performed, and surface plasmon polariton excitation is discussed. A possible effect of the film dewetting from the dielectric substrate is deliberated.
Databáze: MEDLINE
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