| Autor: |
Ghosh AN, Macfarquhar SJ, Aktas O, Saini TS, Oo SZ, Chong HMH, Peacock AC |
| Jazyk: |
angličtina |
| Zdroj: |
Optics express [Opt Express] 2023 Jan 16; Vol. 31 (2), pp. 1532-1540. |
| DOI: |
10.1364/OE.473474 |
| Abstrakt: |
Low-temperature deposited polycrystalline silicon waveguides are emerging as a flexible platform that allows for dense optoelectronic integration. Here, the optical transmission properties of poly-silicon waveguides have been characterized from the near-to-mid-infrared wavelength regime, extending the optical transmission well beyond previous reports in the telecom band. The poly-Si waveguides with a dimension of 3 µm × ∼0.6 µm have been produced from pre-patterned amorphous silicon waveguides that are post-processed through laser melting, reflowing, and crystallization using a highly localized laser induced heat treatment at a wavelength of 532 nm. Low optical transmission losses (<3 dB cm -1 ) have been observed at 1.55 µm as well as across the wavelength range of 2-2.25 µm, aided by the relatively large waveguide heights that are enabled by the deposition process. The results demonstrate the suitability of low-temperature poly-silicon waveguides to find wide ranging applications within integrated mid-infrared systems. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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