An ultra-high vacuum system for fabricating clean two-dimensional material devices.

Autor: Guo S; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China., Luo M; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China., Shi G; Department of Physics, Southern University of Science and Technology, 518055 Shenzhen, China., Tian N; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China., Huang Z; State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai 200050, China., Yang F; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China., Ma L; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China., Wang NZ; Hefei National Laboratory for Physical Science at Microscale and Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China., Shi Q; Center for Biomedical Engineering, Fudan University, Shanghai 200438, China., Xu K; Center for Biomedical Engineering, Fudan University, Shanghai 200438, China., Xu Z; SixCarbon Technology, Youmagang Industry Park, Shenzhen 518106, China., Watanabe K; Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan., Taniguchi T; International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan., Chen XH; Hefei National Laboratory for Physical Science at Microscale and Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China., Shen D; State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai 200050, China., Zhang L; Department of Physics, Southern University of Science and Technology, 518055 Shenzhen, China., Ruan W; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China., Zhang Y; State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China.
Jazyk: angličtina
Zdroj: The Review of scientific instruments [Rev Sci Instrum] 2023 Jan 01; Vol. 94 (1), pp. 013903.
DOI: 10.1063/5.0110875
Abstrakt: High mobility electron gases confined at material interfaces have been a venue for major discoveries in condensed matter physics. Ultra-high vacuum (UHV) technologies played a key role in creating such high-quality interfaces. The advent of two-dimensional (2D) materials brought new opportunities to explore exotic physics in flat lands. UHV technologies may once again revolutionize research in low dimensions by facilitating the construction of ultra-clean interfaces with a wide variety of 2D materials. Here, we describe the design and operation of a UHV 2D material device fabrication system, in which the entire fabrication process is performed under pressure lower than 5 × 10 -10 mbar. Specifically, the UHV system enables the exfoliation of atomically clean 2D materials. Subsequent in situ assembly of van der Waals heterostructures produces high-quality interfaces that are free of contamination. We demonstrate functionalities of this system through exemplary fabrication of various 2D materials and their heterostructures.
Databáze: MEDLINE