A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range.
| Autor: | Ciesielski R; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Lohr LM; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Herrero AF; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Fischer A; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Grothe A; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Mentzel H; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Scholze F; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany., Soltwisch V; Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany. |
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| Jazyk: | angličtina |
| Zdroj: | The Review of scientific instruments [Rev Sci Instrum] 2023 Jan 01; Vol. 94 (1), pp. 013904. |
| DOI: | 10.1063/5.0120146 |
| Abstrakt: | Smaller and more complex nanostructures in the semiconductor industry require a constant upgrade of accompanying metrological methods and equipment. A central task for nanometrology is the precise determination of structural features of gratings in the nanometer range as well as their elemental composition. Scatterometry and x-ray fluorescence in the soft x-ray and extreme ultraviolet spectral ranges are ideally suited to this task. We here present a new, compact measurement chamber that can simultaneously detect the elastically scattered signal and the fluorescence, originating from nanoscale grating samples. Its geometry enables detecting scattered intensity over a wide angular range with a variable angle of incidence. We show first experiments on industry-relevant test structures from the commissioning process alongside the specifications of the setup, located at PTB's soft x-ray radiometry beamline at the synchrotron radiation facility BESSY II in Berlin. |
| Databáze: | MEDLINE |
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