Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas.

Autor: Turutin AV; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.; Department of Physics and I3N, University of Aveiro, 3810-193 Aveiro, Portugal., Skryleva EA; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Kubasov IV; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Milovich FO; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Temirov AA; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Raketov KV; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.; Mapper LLC, Volgogradsky Pr. 42 k. 5, 109316 Moscow, Russia., Kislyuk AM; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Zhukov RN; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Senatulin BR; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Kuts VV; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Malinkovich MD; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia., Parkhomenko YN; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.; JSC ''Giredmet'', 2 Elektrodnaya Str., 111524 Moscow, Russia., Sobolev NA; Laboratory of Physics of Oxide Ferroelectrics, National University of Science and Technology MISiS, 119049 Moscow, Russia.; Department of Physics and I3N, University of Aveiro, 3810-193 Aveiro, Portugal.
Jazyk: angličtina
Zdroj: Materials (Basel, Switzerland) [Materials (Basel)] 2023 Jan 04; Vol. 16 (2). Date of Electronic Publication: 2023 Jan 04.
DOI: 10.3390/ma16020484
Abstrakt: Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium niobate single crystal and a film of magnetostrictive metglas. In the former, a ferroelectric bidomain structure is created using a technique developed by the authors. A cantilever is formed by microblasting inside the lithium niobate crystal. Metglas layers are deposited by magnetron sputtering. The quality of the metglas layers was assessed by XPS depth profiling and TEM. Detailed measurements of the magnetoelectric effect in the quasistatic and dynamic modes were performed. The magnetoelectric coefficient |α 32 | reaches a value of 492 V/(cm·Oe) at bending resonance. The quality factor of the structure was Q = 520. The average phase amounted to 93.4° ± 2.7° for the magnetic field amplitude ranging from 12 to 100 pT. An AC magnetic field detection limit of 12 pT at a resonance frequency of 3065 Hz was achieved which exceeds by a factor of 5 the best value for magnetoelectric MEMS lead-free composites reported in the literature. The noise level of the magnetoelectric signal was 0.47 µV/Hz 1/2 . Ways to improve the sensitivity of the developed sensors to the magnetic field for biomedical applications are indicated.
Databáze: MEDLINE
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