| Autor: |
Smertin RM, Chkhalo NI, Drozdov MN, Garakhin SA, Zuev SY, Polkovnikov VN, Salashchenko NN, Yunin PA |
| Jazyk: |
angličtina |
| Zdroj: |
Optics express [Opt Express] 2022 Dec 19; Vol. 30 (26), pp. 46749-46761. |
| DOI: |
10.1364/OE.475079 |
| Abstrakt: |
The influence of Mo interlayers on the microstructure of films and boundaries, and the reflective characteristics of Ru/Be multilayer mirrors (MLM) were studied by X-ray reflectometry and diffractometry, and secondary ion mass spectrometry (SIMS). An increase in the reflection coefficients of MLM at a wavelength of 11.4 nm to record values of R = 72.2% and FWHM to Δλ 1/2 = 0.38 nm is shown. The effect of interlayers on the structural and reflective characteristics of MLM is explained by the barrier properties of the Mo layers, which prevent the mutual mixing of the Ru and Be layers, which leads to the formation of beryllides and a decrease in the X-ray optical contrast at the boundaries. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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