Assessment of silicon, glass, FR4, PDMS and PMMA as a chip material for acoustic particle/cell manipulation in microfluidics.

Autor: Açıkgöz HN; Microfluidics & Lab-on-a-chip Research Group, Mech. Eng. Department, Bilkent University, Ankara 06800, Turkey; UNAM - National Nanotechnology Research Center and Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey., Karaman A; Mech. Eng. Department, Middle East Technical University 06800 Ankara, Turkey., Şahin MA; Microfluidics & Lab-on-a-chip Research Group, Mech. Eng. Department, Bilkent University, Ankara 06800, Turkey; Mech. Eng. Department, Middle East Technical University 06800 Ankara, Turkey., Çaylan ÖR; Department Materials Sci.Nanotech. Eng., TOBB Uni. Econ. Tech., 06510 Ankara, Turkey., Büke GC; Department Materials Sci.Nanotech. Eng., TOBB Uni. Econ. Tech., 06510 Ankara, Turkey., Yıldırım E; Mech. Eng. Department, Middle East Technical University 06800 Ankara, Turkey., Eroğlu İC; Department Biological Sciences, Middle East Technical University, 06800 Ankara, Turkey., Erson-Bensan AE; Department Biological Sciences, Middle East Technical University, 06800 Ankara, Turkey., Çetin B; Microfluidics & Lab-on-a-chip Research Group, Mech. Eng. Department, Bilkent University, Ankara 06800, Turkey; UNAM - National Nanotechnology Research Center and Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey., Özer MB; Mech. Eng. Department, Middle East Technical University 06800 Ankara, Turkey. Electronic address: ozerb@metu.edu.tr.
Jazyk: angličtina
Zdroj: Ultrasonics [Ultrasonics] 2023 Mar; Vol. 129, pp. 106911. Date of Electronic Publication: 2022 Dec 09.
DOI: 10.1016/j.ultras.2022.106911
Abstrakt: In the present study, the capabilities of different chip materials for acoustic particle manipulation have been assessed with the same microfluidic device architecture, under the same actuator and flow conditions. Silicon, glass, epoxy with fiberglass filling (FR4), polydimethylsiloxane (PDMS) and polymethyl methacrylate (PMMA) are considered as chip materials. The acoustophoretic chips in this study were manufactured with four different fabrication methods: plasma etching, chemical etching, micromachining and molding. A novel chip material, FR4, has been employed as a microfluidic chip material in acoustophoretic particle manipulation for the first time in literature, which combines the ease of manufacturing of polymer materials with improved acoustic performance. The acoustic particle manipulation performance is evaluated through acoustophoretic focusing experiments with 2μm and 12μm polystyrene microspheres and cultured breast cancer cell line (MDA-MB-231). Unlike the common approach in the literature, the piezoelectric materials were actuated with partitioned cross-polarized electrodes which allowed effective actuation of different family of chip materials. Different from previous studies, this study evaluates the performance of each acoustophoretic device through the perspective of synchronization of electrical, vibrational and acoustical resonances, considers the thermal performance of the chip materials with their effects on cell viability as well as manufacturability and scalability of their fabrication methods. We believe our study is an essential work towards the commercialization of acoustophoretic devices since it brings a critical understanding of the effect of chip material on device performance as well as the cost of achieving that performance.
Competing Interests: Declaration of Competing Interest The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
(Copyright © 2022 Elsevier B.V. All rights reserved.)
Databáze: MEDLINE
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