| Autor: |
Hsueh TJ; Department of Electronic Engineering, National Kaohsiung University of Science and Technology, Kaohsiung 807, Taiwan., Ding RY; Department of Electronic Engineering, National Kaohsiung University of Science and Technology, Kaohsiung 807, Taiwan. |
| Jazyk: |
angličtina |
| Zdroj: |
Nanomaterials (Basel, Switzerland) [Nanomaterials (Basel)] 2022 Sep 21; Vol. 12 (19). Date of Electronic Publication: 2022 Sep 21. |
| DOI: |
10.3390/nano12193287 |
| Abstrakt: |
This study uses ultrasonic grinding to grind ZnO powder to 10−20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH3 gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around 39.7%, but the origin-ZnO powder/MEMS gas sensor is fairly unresponsive. For seven consecutive cycles, the ZnO-NPs/MEMS gas sensor has an average sensor response of about 40% and an inaccuracy of <±2%. In the selectivity of the gas, the ZnO-NPs/MEMS gas sensor has a higher response to NH3 than to CO, CO2, H2, or SO2 gases because ZnO nanoparticles have a greater surface area and more surface defects, so they adsorb more oxygen molecules and water molecules. These react with NH3 gas to increase the sensor response. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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