Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics.

Autor: Huber R; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany.; Material Systems for Nanoelectronics, Chemnitz University of Technology, 09107, Chemnitz, Germany., Kern F; Institute for Solid State Research, Leibniz IFW Dresden, Helmholtzstraße 20, 01069, Dresden, Germany., Karnaushenko DD; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany.; Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, 09126, Chemnitz, Germany., Eisner E; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany., Lepucki P; Institute for Solid State Research, Leibniz IFW Dresden, Helmholtzstraße 20, 01069, Dresden, Germany., Thampi A; Institute for Solid State Research, Leibniz IFW Dresden, Helmholtzstraße 20, 01069, Dresden, Germany., Mirhajivarzaneh A; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany., Becker C; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany.; Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, 09126, Chemnitz, Germany., Kang T; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany., Baunack S; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany., Büchner B; Institute for Solid State Research, Leibniz IFW Dresden, Helmholtzstraße 20, 01069, Dresden, Germany.; Institute for Solid State and Materials Physics, TU Dresden, Dresden, Germany., Karnaushenko D; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany. d.karnaushenko@ifw-dresden.de.; Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, 09126, Chemnitz, Germany. d.karnaushenko@ifw-dresden.de., Schmidt OG; Institute for Integrative Nanosciences, Leibniz IFW Dresden, 01069, Dresden, Germany. oliver.schmidt@main.tu-chemnitz.de.; Material Systems for Nanoelectronics, Chemnitz University of Technology, 09107, Chemnitz, Germany. oliver.schmidt@main.tu-chemnitz.de.; Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, 09126, Chemnitz, Germany. oliver.schmidt@main.tu-chemnitz.de.; Nanophysics, Faculty of Physics, TU Dresden, 01062, Dresden, Germany. oliver.schmidt@main.tu-chemnitz.de., Lubk A; Institute for Solid State Research, Leibniz IFW Dresden, Helmholtzstraße 20, 01069, Dresden, Germany. a.lubk@ifw-dresden.de.; Institute for Solid State and Materials Physics, TU Dresden, Dresden, Germany. a.lubk@ifw-dresden.de.
Jazyk: angličtina
Zdroj: Nature communications [Nat Commun] 2022 Jun 09; Vol. 13 (1), pp. 3220. Date of Electronic Publication: 2022 Jun 09.
DOI: 10.1038/s41467-022-30703-y
Abstrakt: Tunable electromagnets and corresponding devices, such as magnetic lenses or stigmators, are the backbone of high-energy charged particle optical instruments, such as electron microscopes, because they provide higher optical power, stability, and lower aberrations compared to their electric counterparts. However, electromagnets are typically macroscopic (super-)conducting coils, which cannot generate swiftly changing magnetic fields, require active cooling, and are structurally bulky, making them unsuitable for fast beam manipulation, multibeam instruments, and miniaturized applications. Here, we present an on-chip microsized magnetic charged particle optics realized via a self-assembling micro-origami process. These micro-electromagnets can generate alternating magnetic fields of about ±100 mT up to a hundred MHz, supplying sufficiently large optical power for a large number of charged particle optics applications. That particular includes fast spatiotemporal electron beam modulation such as electron beam deflection, focusing, and wave front shaping as required for stroboscopic imaging.
(© 2022. The Author(s).)
Databáze: MEDLINE
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