Resistively loaded coplanar waveguide for microwave measurements of induced carriers.
Autor: | Freeman ML; Physics Department, Florida State University, Tallahassee, Florida 32306, USA., Lu TM; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA., Engel LW; National High Magnetic Field Laboratory, Tallahassee, Florida 32310, USA. |
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Jazyk: | angličtina |
Zdroj: | The Review of scientific instruments [Rev Sci Instrum] 2022 Apr 01; Vol. 93 (4), pp. 043901. |
DOI: | 10.1063/5.0085112 |
Abstrakt: | We describe the use of a coplanar waveguide (CPW) whose slots are filled with a resistive film, a resistively loaded CPW (RLCPW), to measure two-dimensional electron systems (2DESs). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate to control the areal charge density of the 2DES. As a demonstration of this technique, we present measurements on a Si metal-oxide-semiconductor field-effect transistor and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW. |
Databáze: | MEDLINE |
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