| Autor: |
Tang Y; School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China., Li J; Beijing Engineering Research Center of Detection and Application for Weak Magnetic Field, Department of Physics, University of Science and Technology Beijing, Beijing 100083, China., Xu L; School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China., Lee JB; Department of Electrical and Computer Engineering, The University of Texas at Dallas, Richardson, TX 75080, USA., Xie H; School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.; BIT Chongqing Center for Microelectronics and Microsystems, Chongqing 400030, China. |
| Abstrakt: |
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced. |
