MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration.

Autor: Alves F; Naval Postgraduate School, Monterey, CA 93943, USA., Park J; Naval Postgraduate School, Monterey, CA 93943, USA., McCarty L; Naval Postgraduate School, Monterey, CA 93943, USA., Rabelo R; Naval Postgraduate School, Monterey, CA 93943, USA., Karunasiri G; Naval Postgraduate School, Monterey, CA 93943, USA.
Jazyk: angličtina
Zdroj: Sensors (Basel, Switzerland) [Sensors (Basel)] 2022 Feb 10; Vol. 22 (4). Date of Electronic Publication: 2022 Feb 10.
DOI: 10.3390/s22041337
Abstrakt: A MEMS directional acoustic sensor housed in an air cavity and operated underwater in a near-neutral buoyancy configuration is demonstrated. The sensor consists of two wings connected by a bridge and attached to a substrate by two centrally mounted torsional legs. The frequency response showed two resonant peaks corresponding to a rocking mode (wings moving in opposite directions) and a bending mode (wings moving in the same direction). Initial tests of the sensor using a shaker table showed that the response is highly dependent on the vibration direction. In air, the sensor showed a maximum sensitivity of about 95 mV/Pa with a cosine directional response. Underwater, the maximum sensitivity was about 37 mV/Pa with a similar cosine directional response. The measured maximum SNR was about 38 dB for a signal generated by a sound stimulus of 1 Pa when the sensor is operated near the bending resonance. The results indicate that this type of MEMS sensor can be operated in a near-neutral buoyant configuration and achieve a good directional response.
Databáze: MEDLINE
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