Programming Semiconductor Nanowire Composition with Sub-100 nm Resolution via the Geode Process.

Autor: Mujica M; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Mohabir A; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Shetty PP; George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Cline WR; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Aziz D; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., McDowell MT; George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.; School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Breedveld V; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Behrens SH; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States., Filler MA; School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.
Jazyk: angličtina
Zdroj: Nano letters [Nano Lett] 2022 Jan 26; Vol. 22 (2), pp. 554-560. Date of Electronic Publication: 2022 Jan 06.
DOI: 10.1021/acs.nanolett.1c02545
Abstrakt: We demonstrate the vapor-liquid-solid growth of single-crystalline i-Si, i-Si/n-Si, and Si x Ge 1- x /Si y Ge 1- y nanowires via the Geode process. By enabling nanowire growth on the large internal surface area of a microcapsule powder, the Geode process improves the scalability of semiconductor nanowire manufacturing while maintaining nanoscale programmability. Here, we show that heat and mass transport limitations introduced by the microcapsule wall are negligible, enabling the same degree of compositional control for nanowires grown inside microcapsules and on conventional flat substrates. Efficient heat and mass transport also minimize the structural variations of nanowires grown in microcapsules with different diameters and wall thicknesses. Nanowires containing at least 16 segments and segment lengths below 75 nm are demonstrated.
Databáze: MEDLINE