A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing.

Autor: Popa D; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK. dp387@cam.ac.uk., Hopper R; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK., Ali SZ; Flusso Limited, Cambridge, CB4 0DL, UK., Cole MT; Department of Electronic and Electrical Engineering, University of Bath, Bath, BA2 7AY, UK., Fan Y; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK., Veigang-Radulescu VP; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK., Chikkaraddy R; Department of Physics, University of Cambridge, Cambridge, CB3 0HE, UK., Nallala J; Biomedical Physics, School of Physics and Astronomy, University of Exeter, Exeter, EX4 4QL, UK., Xing Y; School of Engineering, University of Warwick, Coventry, CV4 7AL, UK., Alexander-Webber J; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK., Hofmann S; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK., De Luca A; Flusso Limited, Cambridge, CB4 0DL, UK., Gardner JW; School of Engineering, University of Warwick, Coventry, CV4 7AL, UK., Udrea F; Department of Engineering, University of Cambridge, Cambridge, CB3 0FA, UK.
Jazyk: angličtina
Zdroj: Scientific reports [Sci Rep] 2021 Nov 25; Vol. 11 (1), pp. 22915. Date of Electronic Publication: 2021 Nov 25.
DOI: 10.1038/s41598-021-02121-5
Abstrakt: The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 [Formula: see text]C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 [Formula: see text]C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.
(© 2021. The Author(s).)
Databáze: MEDLINE
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