Sensitive capacitive pressure sensors based on graphene membrane arrays.

Autor:	Šiškins M; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Lee M; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Wehenkel D; Applied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands., van Rijn R; Applied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands., de Jong TW; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Renshof JR; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Hopman BC; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Peters WSJM; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Davidovikj D; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., van der Zant HSJ; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Steeneken PG; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands.; Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands.
Jazyk:	angličtina
Zdroj:	Microsystems & nanoengineering [Microsyst Nanoeng] 2020 Nov 16; Vol. 6, pp. 102. Date of Electronic Publication: 2020 Nov 16 (Print Publication: 2020).
DOI:	10.1038/s41378-020-00212-3
Abstrakt:	The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8  aF Pa -1 mm -2 , thereby outperforming the commercial sensors. Competing Interests: Conflict of interestThe authors declare that they have no conflict of interest. (© The Author(s) 2020.)
Databáze:	MEDLINE
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