| Autor: |
Nejadriahi H, Pappert S, Fainman Y, Yu P |
| Jazyk: |
angličtina |
| Zdroj: |
Optics letters [Opt Lett] 2021 Sep 15; Vol. 46 (18), pp. 4646-4649. |
| DOI: |
10.1364/OL.431757 |
| Abstrakt: |
The design, fabrication, and characterization of low-loss ultra-compact bends in high-index ( n =3.1 at λ =1550 n m ) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of 65×65µ m 2 , having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of 8 m W / π and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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