Thermal conductivity measurements of sub-surface buried substrates by steady-state thermoreflectance.

Autor:	Hoque MSB; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Koh YR; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Aryana K; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Hoglund ER; Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Braun JL; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Olson DH; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Gaskins JT; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA., Ahmad H; School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA., Elahi MMM; Department of Electrical and Computer Engineering, University of New Mexico, Albuquerque, New Mexico 87131, USA., Hite JK; U.S. Naval Research Laboratory, Washington, DC 20375, USA., Leseman ZC; Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals, Dhahran, Eastern Province 31261, Saudi Arabia., Doolittle WA; School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA., Hopkins PE; Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, USA.
Jazyk:	angličtina
Zdroj:	The Review of scientific instruments [Rev Sci Instrum] 2021 Jun 01; Vol. 92 (6), pp. 064906.
DOI:	10.1063/5.0049531
Abstrakt:	Measuring the thermal conductivity of sub-surface buried substrates is of significant practical interests. However, this remains challenging with traditional pump-probe spectroscopies due to their limited thermal penetration depths. Here, we experimentally and numerically investigate the TPD of the recently developed optical pump-probe technique steady-state thermoreflectance (SSTR) and explore its capability for measuring the thermal properties of buried substrates. The conventional definition of the TPD (i.e., the depth at which temperature drops to 1/e value of the maximum surface temperature) does not truly represent the upper limit of how far beneath the surface SSTR can probe. For estimating the uncertainty of SSTR measurements of a buried substrate a priori, sensitivity calculations provide the best means. Thus, detailed sensitivity calculations are provided to guide future measurements. Due to the steady-state nature of SSTR, it can measure the thermal conductivity of buried substrates that are traditionally challenging by transient pump-probe techniques, exemplified by measuring three control samples. We also discuss the required criteria for SSTR to isolate the thermal properties of a buried film. Our study establishes SSTR as a suitable technique for thermal characterizations of sub-surface buried substrates in typical device geometries.
Databáze:	MEDLINE
Externí odkaz:	Zobrazit plný text záznamu