Visible upconversion luminescence of doped bulk silicon for a multimodal wafer metrology.

Autor: Afinogenov BI, Sofronov AN, Antropov IM, Filatov NR, Medvedev AS, Shorokhov AS, Mantsevich VN, Maslova NS, Kim T, Jeang E, Kim I, Seo M, Han K, Bae S, Joo W, Yoo H, Bessonov VO, Fedyanin AA, Ryabko MV, Polonsky SV
Jazyk: angličtina
Zdroj: Optics letters [Opt Lett] 2021 Jul 01; Vol. 46 (13), pp. 3071-3074.
DOI: 10.1364/OL.424834
Abstrakt: We report the experimental observation of the UV-visible upconverted luminescence of bulk silicon under pulsed infrared excitation. We demonstrate that non-stationary distribution of excited carriers leads to the emission at spectral bands never to our knowledge observed before. We show that the doping type and concentration alter the shape of luminescence spectra. Silicon nanoparticles have a size between quantum-confined and Mie-type limits (10-100 nm) yet show increased luminescence intensity when placed atop a silicon wafer. The findings demonstrate that upconversion luminescence can become a powerful tool for nearest future silicon wafer inspection systems as a multimodal technique of measuring the several parameters of the wafer simultaneously.
Databáze: MEDLINE