| Autor: |
Skovlund Madsen J, Geisler M, Berri Lotz M, Zalkovskij M, Bilenberg B, Korhonen R, Peltonen P, Erik Hansen P, Alkærsig Jensen S |
| Jazyk: |
angličtina |
| Zdroj: |
Optics express [Opt Express] 2021 Feb 01; Vol. 29 (3), pp. 3882-3890. |
| DOI: |
10.1364/OE.411669 |
| Abstrakt: |
We present an in-line metrology solution for dimensional characterization of roll-to-roll imprinted nanostructures. The solution is based on a scatterometric analysis of optical data from a hyperspectral camera deployed at a production facility, where nanostructures are produced at speeds of 10m/min. The system combines the ease of use of a real-space imaging system with the spectral information used in scatterometry. We present nanoscale dimensional measurements on one-dimensional line gratings with various periods and orientations. The depths of the produced structures are accurately characterized with uncertainties on the scale of a few nanometers. The hyperspectral imaging capabilities of the system can also be used to avoid vibrational effects. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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