| Autor: |
Kluczyk-Korch K; Department of Electronic Engineering, University of Rome 'Tor Vergata', Via del Politechnico 1, 00133 Rome, Italy., Palazzo D; Department of Electronic Engineering, University of Rome 'Tor Vergata', Via del Politechnico 1, 00133 Rome, Italy., Waag A; Institute for Semiconductor Technology, University of Technology Braunschweig, Braunschweig, Germany.; Laboratory for Emerging Nanometrology LENA, Braunschweig, Germany., Diéguez A; Department of Electronic and Biomedical Engineering, University of Barcelona, Barcelona, Spain., Prades JD; Department of Electronic and Biomedical Engineering, University of Barcelona, Barcelona, Spain., Di Carlo A; Department of Electronic Engineering, University of Rome 'Tor Vergata', Via del Politechnico 1, 00133 Rome, Italy.; ISM-CNR, Via Fosso del Cavaliere 100, 00133 Rome, Italy., der Maur MA; Department of Electronic Engineering, University of Rome 'Tor Vergata', Via del Politechnico 1, 00133 Rome, Italy. |
| Abstrakt: |
The physical laws of diffraction limit the spatial resolution of optical systems. In contrary to most superresolution microscopy approaches used today, in our novel idea we are aiming to overcome this limit by developing a spatially resolved illumination source based on semiconductor nanoscale light emitting diode (nanoLED) arrays with individual pixel control. We present and discuss the results of optical simulations performed for such nanoLED emitter arrays and analyze the theoretical limits of this approach. As possible designs we study arrays of GaN nanofins and nanorods (obtained by etching nanofin arrays), with InGaN/GaN multi quantum wells embedded as active regions. We find that a suitable choice of the array dimensions leads to a reasonably directed light output and concentration of the optical power in the near field around an activated pixel. As a consequence, the spatial resolution for this type of microscopy should only be limited by the pixel pitch, and no longer by the optical diffraction. Realization of optimized nanoLED arrays has a potential to open new field of chip based superresolution microscopy, making super-high spatial resolution ubiquitously available. |
