Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization.
| Autor: | Li Z; Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455, United States., Wray PR; Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, MS 128-95, Pasadena, California 91125 United States., Su MP; Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, MS 128-95, Pasadena, California 91125 United States., Tu Q; Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455, United States., Andaraarachchi HP; Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455, United States., Jeong YJ; Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455, United States., Atwater HA; Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, MS 128-95, Pasadena, California 91125 United States., Kortshagen UR; Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455, United States. |
|---|---|
| Jazyk: | angličtina |
| Zdroj: | ACS omega [ACS Omega] 2020 Sep 14; Vol. 5 (38), pp. 24754-24761. Date of Electronic Publication: 2020 Sep 14 (Print Publication: 2020). |
| DOI: | 10.1021/acsomega.0c03353 |
| Abstrakt: | Aluminum oxide, both in amorphous and crystalline forms, is a widely used inorganic ceramic material because of its chemical and structural properties. In this work, we synthesized amorphous aluminum oxide nanoparticles using a capacitively coupled nonthermal plasma utilizing trimethylaluminum and oxygen as precursors and studied their crystallization and phase transformation behavior through postsynthetic annealing. The use of two reactor geometries resulted in amorphous aluminum oxide nanoparticles with similar compositions but different sizes. Size tuning of these nanoparticles was achieved by varying the reactor pressure to produce amorphous aluminum oxide nanoparticles ranging from 6 to 22 nm. During postsynthetic annealing, powder samples of amorphous nanoparticles began to crystallize at 800 °C, forming crystalline θ and γ phase alumina. Their phase transformation behavior was found to be size-dependent in that powders of small 6 nm amorphous particles transformed to form phase-pure α-Al Competing Interests: The authors declare no competing financial interest. |
| Databáze: | MEDLINE |
| Externí odkaz: |
|