Micromachining of Invar with 784 Beams Using 1.3 ps Laser Source at 515 nm.

Autor: Hauschwitz P; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic.; Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 115 19 Prague, Czech Republic., Stoklasa B; Meopta-optika, s.r.o., Kabelikova 1, 750 02 Prerov, Czech Republic., Kuchařík J; Meopta-optika, s.r.o., Kabelikova 1, 750 02 Prerov, Czech Republic., Turčičová H; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic., Písařík M; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic., Brajer J; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic., Rostohar D; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic., Mocek T; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic., Duda M; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic.; Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 115 19 Prague, Czech Republic., Lucianetti A; HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic.
Jazyk: angličtina
Zdroj: Materials (Basel, Switzerland) [Materials (Basel)] 2020 Jul 02; Vol. 13 (13). Date of Electronic Publication: 2020 Jul 02.
DOI: 10.3390/ma13132962
Abstrakt: To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its unique properties, especially a low coefficient of thermal expansion. In this study, a novel cost-efficient method of multi-beam micromachining of invar will be introduced. The combination of a Meopta beam splitting, focusing and monitoring module with a galvanometer scanner and HiLASE high-energy pulse laser system emitting ultrashort pulses at 515 nm allows drilling and cutting of invar foil with 784 beams at once with high precision and almost no thermal effects and heat-affected zone, thus significantly improving the throughput and efficiency.
Databáze: MEDLINE
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