In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection.

Autor: Setiono A; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.; Research Center for Physics, Indonesian Institute of Sciences (LIPI), 15314 Tangerang Selatan, Indonesia., Bertke M; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany., Nyang'au WO; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.; Department of Metrology, Kenya Bureau of Standards (KEBS), 00200 Nairobi, Kenya., Xu J; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany., Fahrbach M; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany., Kirsch I; Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany., Uhde E; Fraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany., Deutschinger A; SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria., Fantner EJ; SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria., Schwalb CH; GETec Microscopy GmbH, 1220 Vienna, Austria., Wasisto HS; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany., Peiner E; Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Jazyk: angličtina
Zdroj: Sensors (Basel, Switzerland) [Sensors (Basel)] 2020 Jan 22; Vol. 20 (3). Date of Electronic Publication: 2020 Jan 22.
DOI: 10.3390/s20030618
Abstrakt: In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm 3 and 300 × 100 × 4 µm 3 , which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m 3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.
Competing Interests: The authors declare no conflict of interest.
Databáze: MEDLINE
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