| Autor: |
Dangi A, Cheng CY, Agrawal S, Tiwari S, Datta GR, Benoit RR, Pratap R, Trolier-Mckinstry S, Kothapalli SR |
| Jazyk: |
angličtina |
| Zdroj: |
IEEE transactions on ultrasonics, ferroelectrics, and frequency control [IEEE Trans Ultrason Ferroelectr Freq Control] 2020 Apr; Vol. 67 (4), pp. 801-809. Date of Electronic Publication: 2019 Nov 28. |
| DOI: |
10.1109/TUFFC.2019.2956463 |
| Abstrakt: |
A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of [Formula: see text] diameter and [Formula: see text] pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 V pp input. A receive sensitivity of ~0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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