Diamond nanofocusing refractive X-ray lenses made by planar etching technology.

Autor: Lyubomirskiy M; Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany., Boye P; Institute of Structural Physics, TU Dresden, Zellescher Weg 16, 01069 Dresden, Germany., Feldkamp JM; Institute of Structural Physics, TU Dresden, Zellescher Weg 16, 01069 Dresden, Germany., Patommel J; Institute of Structural Physics, TU Dresden, Zellescher Weg 16, 01069 Dresden, Germany., Schoeder S; Synchrotron SOLEIL, L'Orme des Merisiers, Saint-Aubin, BP 48, 91192 Gif-sur-Yvette Cedex, France., Schropp A; Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany., Burghammer M; European Synchrotron Radiation Facility, 71 Avenue des Martyrs, 38043 Grenoble, France., Wild C; Diamond Materials GmbH, Hans-Bunte-Straße 19, 79108 Freiburg, Germany., Schroer CG; Deutsches Elektronen-Synchrotron DESY, Notkestraße 85, 22607 Hamburg, Germany.
Jazyk: angličtina
Zdroj: Journal of synchrotron radiation [J Synchrotron Radiat] 2019 Sep 01; Vol. 26 (Pt 5), pp. 1554-1557. Date of Electronic Publication: 2019 Aug 01.
DOI: 10.1107/S1600577519007082
Abstrakt: The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360 nm (FWHM) at an energy E = 24.3 keV is observed.
Databáze: MEDLINE
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