Microwave Monitoring of Atmospheric Corrosion of Interconnects.

Autor:	Amoah PK; Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA., Veksler D; Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA., Sunday CE; Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA., Moreau S; CEA-LETI, MINATEC Campus, F-38054 Grenoble, France., Bouchu D; CEA-LETI, MINATEC Campus, F-38054 Grenoble, France., Obeng YS; Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Jazyk:	angličtina
Zdroj:	ECS journal of solid state science and technology : JSS [ECS J Solid State Sci Technol] 2018; Vol. 7.
DOI:	10.1149/2.0181812jss
Abstrakt:	Traditional metrology has been unable to adequately address the reliability needs of emerging integrated circuits at the nano scale; thus, new metrology and techniques are needed. In this paper, we use microwave propagation characteristics (insertion loss and dispersion) to study the atmospheric interconnect corrosion under accelerated stress conditions. The results presented in this work indicate that the corrosion resilience of the test device is limited by the thermal aging of the passivation layer.
Databáze:	MEDLINE
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