Efficient tunnel junction contacts for high-power semipolar III-nitride edge-emitting laser diodes.

Autor: Hamdy KW, Young EC, Alhassan AI, Becerra DL, DenBaars SP, Speck JS, Nakamura S
Jazyk: angličtina
Zdroj: Optics express [Opt Express] 2019 Mar 18; Vol. 27 (6), pp. 8327-8334.
DOI: 10.1364/OE.27.008327
Abstrakt: We demonstrate high-power edge-emitting laser diodes (LDs) with tunnel junction contacts grown by molecular beam epitaxy (MBE). Under pulsed conditions, lower threshold current densities were observed from LDs with MBE-grown tunnel junctions than from similarly fabricated control LDs with ITO contacts. LDs with tunnel junction contacts grown by metal-organic chemical vapor deposition (MOCVD) were additionally demonstrated. These LDs were fabricated using a p-GaN activation scheme utilizing lateral diffusion of hydrogen through the LD ridge sidewalls. Secondary ion mass spectroscopy measurements of the [Si] and [Mg] profiles in the MBE-grown and MOCVD-grown tunnel junctions were conducted to further investigate the results.
Databáze: MEDLINE