In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array.
| Autor: | Badami VG; Zygo Corporation, 21 Laurel Brook Road, Middlefield, Connecticut 06455, USA., Abruña E; Zygo Corporation, 21 Laurel Brook Road, Middlefield, Connecticut 06455, USA., Huang L; Brookhaven National Laboratory-NSLS II, Upton, New York 11973, USA., Idir M; Brookhaven National Laboratory-NSLS II, Upton, New York 11973, USA. |
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| Jazyk: | angličtina |
| Zdroj: | The Review of scientific instruments [Rev Sci Instrum] 2019 Feb; Vol. 90 (2), pp. 021703. |
| DOI: | 10.1063/1.5060954 |
| Abstrakt: | Adaptive x-ray mirrors are emerging as one of the primary solutions for meeting the performance needs of the next generation of x-ray light sources. Currently, these mirrors operate open loop with intermittent feedback from invasive sensors that measure the beam quality. This paper outlines a novel design for real-time in situ metrology of the shape of these mirrors using an array of interferometric sensors that does not interrupt the x-ray beam. We describe a proof-of-principle demonstration which shows sub-nm agreement over a range of mirror deflection magnitudes and shapes as compared to simultaneous measurements by using a large-aperture Fizeau interferometer. |
| Databáze: | MEDLINE |
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