Chemical Imaging of Buried Interfaces in Organic-Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry.

Autor:	Tiddia M; Università Degli Studi di Cagliari , Dipartimento di Fisica , S. P. 8 Km 0.700 , 09042 Monserrato (CA) , Italy.; National Physical Laboratory , Hampton Road , Teddington TW11 0LW , U.K., Mihara I; Kuraray Company Limited , 2045-1 , Sakazu, Kurashiki , Okayama 710-0801 , Japan., Seah MP; National Physical Laboratory , Hampton Road , Teddington TW11 0LW , U.K., Trindade GF; ∥ Centre for Additive Manufacturing , The University of Nottingham , Jubilee Campus , Nottingham NG8 1BB , U.K.; School of Pharmacy , The University of Nottingham , University Park , Nottingham NG7 2RD , U.K., Kollmer F; IONTOF GmbH , Heisenbergstr. 15 , 48149 Münster , Germany., Roberts CJ; School of Pharmacy , The University of Nottingham , University Park , Nottingham NG7 2RD , U.K., Hague R; ∥ Centre for Additive Manufacturing , The University of Nottingham , Jubilee Campus , Nottingham NG8 1BB , U.K., Mula G; Università Degli Studi di Cagliari , Dipartimento di Fisica , S. P. 8 Km 0.700 , 09042 Monserrato (CA) , Italy., Gilmore IS; National Physical Laboratory , Hampton Road , Teddington TW11 0LW , U.K., Havelund R; National Physical Laboratory , Hampton Road , Teddington TW11 0LW , U.K.
Jazyk:	angličtina
Zdroj:	ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2019 Jan 30; Vol. 11 (4), pp. 4500-4506. Date of Electronic Publication: 2019 Jan 17.
DOI:	10.1021/acsami.8b15091
Abstrakt:	Organic-inorganic hybrid materials enable the design and fabrication of new materials with enhanced properties. The interface between the organic and inorganic materials is often critical to the device's performance; therefore, chemical characterization is of significant interest. Because the interfaces are often buried, milling by focused ion beams (FIBs) to expose the interface is becoming increasingly popular. Chemical imaging can subsequently be obtained using secondary-ion mass spectrometry (SIMS). However, the FIB milling process damages the organic material. In this study, we make an organic-inorganic test structure to develop a detailed understanding of the processes involved in FIB milling and SIMS imaging. We provide an analysis methodology that involves a "clean-up" process using sputtering with an argon gas cluster ion source to remove the FIB-induced damage. The methodology is evaluated for two additive manufactured devices, an encapsulated strain sensor containing silver tracks embedded in a polymeric material and a copper track on a flexible polymeric substrate created using a novel nanoparticle sintering technique.
Databáze:	MEDLINE
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