| Autor: |
Chen B, Yu X, Chen X, Milosevic MM, Thomson DJ, Khokhar AZ, Saito S, Muskens OL, Reed GT |
| Jazyk: |
angličtina |
| Zdroj: |
Optics express [Opt Express] 2018 Sep 17; Vol. 26 (19), pp. 24953-24963. |
| DOI: |
10.1364/OE.26.024953 |
| Abstrakt: |
Fabrication errors pose significant challenges on silicon photonics, promoting post-fabrication trimming technologies to ensure device performance. Conventional approaches involve multiple trimming and characterization steps, impacting overall fabrication complexity. Here we demonstrate a highly accurate trimming method combining laser annealing of germanium implanted silicon waveguide and real-time monitoring of device performance. Direct feedback of the trimming process is facilitated by a differential spectroscopic technique based on photomodulation. The resonant wavelength trimming accuracy is better than 0.15 nm for ring resonators with 20-µm radius. We also realize operating point trimming of Mach-Zehnder interferometers with germanium implanted arms. A phase shift of 1.2π is achieved by annealing a 7-μm implanted segment. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
|
