On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing.

Autor:	Erfan M; Faculty of Engineering, Ain-Shams University, Abbassia, Cairo, Egypt Mazen.Erfan@eng.asu.edu.eg., Sabry YM; Faculty of Engineering, Ain-Shams University, Abbassia, Cairo, Egypt Si-Ware Systems, Heliopolis, Cairo, Egypt., Sakr M; Faculty of Engineering, Ain-Shams University, Abbassia, Cairo, Egypt., Mortada B; Si-Ware Systems, Heliopolis, Cairo, Egypt., Medhat M; Si-Ware Systems, Heliopolis, Cairo, Egypt., Khalil D; Faculty of Engineering, Ain-Shams University, Abbassia, Cairo, Egypt Si-Ware Systems, Heliopolis, Cairo, Egypt.
Jazyk:	angličtina
Zdroj:	Applied spectroscopy [Appl Spectrosc] 2016 May; Vol. 70 (5), pp. 897-904. Date of Electronic Publication: 2016 Apr 04.
DOI:	10.1177/0003702816638295
Abstrakt:	In this work, we study the detection of acetylene (C2H2), carbon dioxide (CO2) and water vapor (H2O) gases in the near-infrared (NIR) range using an on-chip silicon micro-electro-mechanical system (MEMS) Fourier transform infrared (FT-IR) spectrometer in the wavelength range 1300-2500 nm (4000-7692 cm(-1)). The spectrometer core engine is a scanning Michelson interferometer micro-fabricated using a deep-etching technology producing self-aligned components. The light is free-space propagating in-plane with respect to the silicon chip substrate. The moving mirror of the interferometer is driven by a relatively large stroke electrostatic comb-drive actuator corresponding to about 30 cm(-1) resolution. Multi-mode optical fibers are used to connect light between the wideband light source, the interferometer, the 10 cm gas cell, and the optical detector. A wide dynamic range of gas concentration down to 2000 parts per million (ppm) in only 10 cm length gas cell is demonstrated. Extending the wavelength range to the mid-infrared (MIR) range up to 4200 nm (2380 cm(-1)) is also experimentally demonstrated, for the first time, using a bulk micro-machined on-chip MEMS FT-IR spectrometer. The obtained results open the door for an on-chip optical gas sensor for many applications including environmental sensing and industrial process control in the NIR/MIR spectral ranges. (© The Author(s) 2016.)
Databáze:	MEDLINE
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