| Autor: |
Goh SJ, Bastiaens HJ, Vratzov B, Huang Q, Bijkerk F, Boller KJ |
| Jazyk: |
angličtina |
| Zdroj: |
Optics express [Opt Express] 2015 Feb 23; Vol. 23 (4), pp. 4421-34. |
| DOI: |
10.1364/OE.23.004421 |
| Abstrakt: |
We present state-of-the-art high resolution transmission gratings, applicable for spectroscopy in the vacuum ultraviolet (VUV) and the soft X-ray (SRX) wavelength range, fabricated with a novel process using ultraviolet based nano imprint lithography (UV-NIL). Free-standing, high-line-density gratings with up to 10,000 lines per mm and various space-to-period ratios were fabricated. An optical characterization of the gratings was carried out in the range from 17 to 34 nm wavelength using high-harmonic generation in a capillary waveguide filled with Ne, and around 13.5 nm wavelength (from 10 to 17 nm) using a Xenon discharge plasma. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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