Large displacement vertical translational actuator based on piezoelectric thin films.

Autor: Qiu Z; Department of Biomedical Engineering, University of Michigan, 2200 Bonisteel Dr., Ann Arbor, MI 48109-2099, USA., Pulskamp JS; U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Rd., Adelphi, MD, 20873, USA., Lin X; Department of Mechanical Engineering, University of Michigan, 2350 Hayward Ave., Ann Arbor, MI 48109-2122, USA., Rhee CH; Department of Mechanical Engineering, University of Michigan, 2350 Hayward Ave., Ann Arbor, MI 48109-2122, USA., Wang T; Department of Biomedical Engineering, University of Michigan, 2200 Bonisteel Dr., Ann Arbor, MI 48109-2099, USA., Polcawich RG; U.S. Army Research Laboratory, Sensors and Electron Devices Directorate, 2800 Powder Mill Rd., Adelphi, MD, 20873, USA., Oldham K; Department of Mechanical Engineering, University of Michigan, 2350 Hayward Ave., Ann Arbor, MI 48109-2122, USA.
Jazyk: angličtina
Zdroj: Journal of micromechanics and microengineering : structures, devices, and systems [J Micromech Microeng] 2010 Jul; Vol. 20 (7).
DOI: 10.1088/0960-1317/20/7/075016
Abstrakt: A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead-zirconate-titanate (PZT) thin film. Prototype designs have shown as much as 120 μ m of static displacement, with 80-90 μ m displacements being typical, using four 920 μ m long by 70 μ m legs. Analytical models are presented that accurately describe nonlinear behavior in both static and dynamic operation of prototype stages when the dependence of piezoelectric coefficients on voltage is known. Resonance of the system is observed at a frequency of 200 Hz. The large displacement and high bandwidth of the actuators at low-voltage and low-power levels should make them useful to a variety of optical applications, including endoscopic microscopy.
Databáze: MEDLINE
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