| Autor: |
Rieger T; Peter Grünberg Institut 9, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany. JARA-Fundamentals of Future Information Technology, Jülich-Aachen Research Alliance, Germany., Jörres T, Vogel J, Biermanns A, Pietsch U, Grützmacher D, Lepsa MI |
| Jazyk: |
angličtina |
| Zdroj: |
Nanotechnology [Nanotechnology] 2014 Oct 10; Vol. 25 (40), pp. 405701. Date of Electronic Publication: 2014 Sep 11. |
| DOI: |
10.1088/0957-4484/25/40/405701 |
| Abstrakt: |
We report the impact of deposition parameters on the structure of HfO(2) covering InAs nanowires (NWs) being potential candidates for future field-effect transistors (FETs). Molecular beam epitaxial-grown Au-free InAs NWs were covered with HfO(2) deposited by atomic-layer deposition. The impact of the film thickness as well as the deposition temperature on the occurrence and amount of crystalline HfO(2) regions was investigated by high-resolution transmission electron microscopy (TEM) and x-ray diffraction. Compared to the deposition on planar Si substrates, the formation probability of crystalline HfO(2) on InAs NWs is significantly enhanced. Here, even 3 nm thick films deposited at 250 °C are partly crystalline. Similarly, a low deposition temperature of 125 °C does not result in completely amorphous 10 nm thick HfO(2) films, they contain monoclinic as well as orthorhombic HfO(2) nanocrystals. Combining HfO(2) and Al(2)O(3) into a laminate structure is capable of suppressing the formation of crystalline HfO2 grains. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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