Evolution and characteristics of GaN nanowires produced via maskless reactive ion etching.

Autor: Haab A; Peter Grünberg Institut (PGI-9), Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany. Jülich-Aachen Research Alliance, Fundamentals of Future Information Technology (JARA-FIT), Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany., Mikulics M, Sutter E, Jin J, Stoica T, Kardynal B, Rieger T, Grützmacher D, Hardtdegen H
Jazyk: angličtina
Zdroj: Nanotechnology [Nanotechnology] 2014 Jun 27; Vol. 25 (25), pp. 255301. Date of Electronic Publication: 2014 Jun 04.
DOI: 10.1088/0957-4484/25/25/255301
Abstrakt: The formation of nanowires (NWs) by reactive ion etching (RIE) of maskless GaN layers was investigated. The morphological, structural and optical characteristics of the NWs were studied and compared to those of the layer they evolve from. It is shown that the NWs are the result of a defect selective etching process. The evolution of density and length with etching time is discussed. Densely packed NWs with a length of more than 1 μm and a diameter of ∼60 nm were obtained by RIE of a ∼2.5 μm thick GaN layer. The NWs are predominantly free of threading dislocations and show an improvement of optical properties compared to their layer counterpart. The production of NWs via a top down process on non-masked group III-nitride layers is assessed to be very promising for photovoltaic applications.
Databáze: MEDLINE