| Autor: |
Kim HJ; Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL 61801, USA., Moldovan N, Felts JR, Somnath S, Dai Z, Jacobs TD, Carpick RW, Carlisle JA, King WP |
| Jazyk: |
angličtina |
| Zdroj: |
Nanotechnology [Nanotechnology] 2012 Dec 14; Vol. 23 (49), pp. 495302. Date of Electronic Publication: 2012 Nov 13. |
| DOI: |
10.1088/0957-4484/23/49/495302 |
| Abstrakt: |
We report a wear-resistant ultrananocrystalline (UNCD) diamond tip integrated onto a heated atomic force microscope (AFM) cantilever and UNCD tips integrated into arrays of heated AFM cantilevers. The UNCD tips are batch-fabricated and have apex radii of approximately 10 nm and heights up to 7 μm. The solid-state heater can reach temperatures above 600 °C and is also a resistive temperature sensor. The tips were shown to be wear resistant throughout 1.2 m of scanning on a single-crystal silicon grating at a force of 200 nN and a speed of 10 μm s(-1). Under the same conditions, a silicon tip was completely blunted. We demonstrate the use of these heated cantilevers for thermal imaging in both contact mode and intermittent contact mode, with a vertical imaging resolution of 1.9 nm. The potential application to nanolithography was also demonstrated, as the tip wrote hundreds of polyethylene nanostructures. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
|
