| Autor: |
Siria A; Institut Néel, CNRS-Université Joseph Fourier Grenoble, BP 166, F-38042 Grenoble Cedex 9, France. CEA-LETI, 17 Avenue des Martyrs, F-38054 Grenoble Cedex 9, France., Rodrigues MS, Dhez O, Schwartz W, Torricelli G, Ledenmat S, Rochat N, Auvert G, Bikondoa O, Metzger TH, Wermeille D, Felici R, Comin F, Chevrier J |
| Jazyk: |
angličtina |
| Zdroj: |
Nanotechnology [Nanotechnology] 2008 Nov 05; Vol. 19 (44), pp. 445501. Date of Electronic Publication: 2008 Sep 26. |
| DOI: |
10.1088/0957-4484/19/44/445501 |
| Abstrakt: |
We report here for the first time the combination of x-ray synchrotron light and a micro-electro-mechanical system (MEMS). We show how it is possible to modulate in real time a MEMS mass distribution to induce a nanometric and tunable mechanical oscillation. The quantitative experimental demonstration we present here uses periodic thermal dilatation of a Ge microcrystal attached to a Si microlever, induced by controlled absorption of an intensity modulated x-ray microbeam. The mechanism proposed can be envisaged either for the detection of small heat flux or for the actuation of a mechanical system. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
|
