A Parylene MEMS Electrothermal Valve.

Autor: Li PY; Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089 USA ( poyingli@usc.edu )., Givrad TK, Holschneider DP, Maarek JM, Meng E
Jazyk: angličtina
Zdroj: Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems [J Microelectromech Syst] 2009 Dec; Vol. 18 (6), pp. 1184-1197.
DOI: 10.1109/JMEMS.2009.2031689
Abstrakt: The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.
Databáze: MEDLINE