Atom probe tomography and transmission electron microscopy of a Mg-doped AlGaN/GaN superlattice.

Autor: Bennett SE; Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK. sb534@cam.ac.uk, Ulfig RM, Clifton PH, Kappers MJ, Barnard JS, Humphreys CJ, Oliver RA
Jazyk: angličtina
Zdroj: Ultramicroscopy [Ultramicroscopy] 2011 Feb; Vol. 111 (3), pp. 207-11. Date of Electronic Publication: 2010 Dec 01.
DOI: 10.1016/j.ultramic.2010.11.028
Abstrakt: The electronic characteristics of semiconductor-based devices are greatly affected by the local dopant atom distribution. In Mg-doped GaN, the clustering of dopants at structural defects has been widely reported, and can significantly affect p-type conductivity. We have studied a Mg-doped AlGaN/GaN superlattice using transmission electron microscopy (TEM) and atom probe tomography (APT). Pyramidal inversion domains were observed in the TEM and the compositional variations of the dopant atoms associated with those defects have been studied using APT. Rarely has APT been used to assess the compositional variations present due to structural defects in semiconductors. Here, TEM and APT are used in a complementary fashion, and the strengths and weaknesses of the two techniques are compared.
(Copyright © 2010 Elsevier B.V. All rights reserved.)
Databáze: MEDLINE
Externí odkaz: