Focused laser lithographic system.
| Autor: | Becker RA, Sopori BL, Chang WS |
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| Jazyk: | angličtina |
| Zdroj: | Applied optics [Appl Opt] 1978 Apr 01; Vol. 17 (7), pp. 1069-71. |
| DOI: | 10.1364/AO.17.001069 |
| Abstrakt: | A focused laser lithographic system (FLLS) has been constructed. Details of the construction of this system and its performance are given. Results indicate that certain modifications to the system will enable it to rival much more expensive systems. |
| Databáze: | MEDLINE |
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