| Autor: |
Bigler E; Lab. de Phys. et Metrol. des Oscillateurs, CNRS, Besancon., Gavignet E, Ballandras S, Denissenko S, Cambril E |
| Jazyk: |
angličtina |
| Zdroj: |
IEEE transactions on ultrasonics, ferroelectrics, and frequency control [IEEE Trans Ultrason Ferroelectr Freq Control] 1997; Vol. 44 (2), pp. 399-405. |
| DOI: |
10.1109/58.585124 |
| Abstrakt: |
Surface transverse wave (STW) resonators, based on the propagation of high velocity shear horizontal waves on Y-rotated quartz were designed, fabricated and tested. A model is presented to predict the resonant frequency of a 3-grating structure as a function of design parameters such as periodicities, metal thickness, and finger-to-gap ratio. Experimental devices have been fabricated by direct e-beam lithography with linewidth geometries in the range of 0.3-0.5 mum, and an operating frequency close to 3 GHz in fundamental mode. Two different designs using either a quasi synchronous structure (type 1) or a change of periodicity inside the cavity (type 2) were tested. The best experimental factor of merit is close to the best results already published for quartz STW resonators. |
| Databáze: |
MEDLINE |
| Externí odkaz: |
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