Characterization of the topography of vacuum-deposited films. 2: Ellipsometry.
Autor: | Raaijmakers IJ, Verkerk MJ |
---|---|
Jazyk: | angličtina |
Zdroj: | Applied optics [Appl Opt] 1986 Oct 15; Vol. 25 (20), pp. 3610. |
DOI: | 10.1364/ao.25.003610 |
Databáze: | MEDLINE |
Externí odkaz: |