Characterization of the topography of vacuum-deposited films. 2: Ellipsometry.

Autor: Raaijmakers IJ, Verkerk MJ
Jazyk: angličtina
Zdroj: Applied optics [Appl Opt] 1986 Oct 15; Vol. 25 (20), pp. 3610.
DOI: 10.1364/ao.25.003610
Databáze: MEDLINE