Lithography. [elektronicky zdroj] : main techniques.
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| Jazyk: | angličtina |
| Informace o vydání: | London : ISTE ; Hoboken, N.J. : Wiley, 2011. |
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| Druh dokumentu: | Bibliographies; Electronic; Non-fiction; Electronic document |
| Abstrakt: | Summary: "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher. |
| Databáze: | Vybrané kolekce e-knih |
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