Optical emission spectroscopy of CN(x) plasma species in hybrid pulsed laser deposition system.

Autor: Novotný, Michal
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Jazyk: angličtina
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Druh dokumentu: Non-fiction
ISSN: 0447-6441
Abstrakt: Abstract: Thin CN(x) films were deposited by hybrid pulsed laser deposition system KrF excimer laser in combination with the additional radio-frequency discharge in the nitrogen gas was used. A role of atomic nitrogen for CN radical formation was studied using an optical emission spectroscopy (OES). The composition of the films was measured by WDX. The N/C ratio of all films was up to 1.
Databáze: Katalog Knihovny AV ČR