| Abstrakt: |
Abstract: A novel method of estimation of the shape of scanning capacitance microscope probes is described. It is based on measurement of the probe/test structure capacitance at a series of tip-to-surface separations. The proposed test structures are cylinders protruding from a smooth flat conducting surface. The well defined geometry can be, in contrast to depletion layers in semiconductors, sufficiently accurately measured. Their further advantage is the axial symmetry rendering relatively simple modelling possible. An alternative procedure may utilise the modulation of the capacitance by vibrating the probe perpendicular to surface. This approach is suitable also for microscopes, which cannot measure the absolute capacitance only its differences. |
