Reactive ion etching of benzocyclobutene polymer films.
| Autor: | Chinoy, Percy B. |
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| Zdroj: | IEEE Transactions on Components, Packaging & Manufacturing Technology, Part C. Jul97, Vol. 20 Issue 3, p199. 8p. 3 Black and White Photographs, 2 Diagrams, 10 Graphs. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
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